END EFFECTORS

Wafer handling End-Effectors have a long history of operation in semiconductor wafer fabrication. Several of Kensington’s End-Effector innovations have advanced wafer processing capability. These include 300mm Edge-Grip for reduce particle performance and Through Beam Technology for wafer mapping. End-Effectors are used across the semiconductor equipment spectrum: Metrology Systems; Deposition Systems; Etch Systems; Reticle Process Systems; Thermal Processing Systems.