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Features of Reactive Ion Etching Systems

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Hind High Vacuum

HHV Reactive Ion Etching (RIE) systems are sophisticated pieces of equipment used to etch materials from substrates at an atomic layer level. These systems are used in a variety of industries, including manufacturing of semiconductors, fabrication of MEMS components and in Atomic Layer Deposition (ALD) applications. RIE systems generally come equipped with several features that enable precision etching, including a powerful ion source, an automated gas delivery system, an advanced computer control system and an integrated vacuum system. This combination of features allows for precise etching enabling creation of highly-complex components with high levels of accuracy and repeatability.


HHV Reactive Ion Etching Systems offer a variety of features that make them a versatile and reliable tool for etching applications. The systems are designed to provide precise control over the etching process and can be used to etch nearly every material. They offer accurate control over etch depth and uniformity making them an ideal choice for applications that require precise etching. Additionally, Reactive Ion Etching Systems are capable of achieving high etch rates with minimal material damage and allow for depth control in multiple etching steps. The systems also provide excellent reproducibility allowing for repeatable results. This makes them a great choice for applications requiring high precision and repeatable results.


HHV's Reactive Ion Etching (RIE) systems are state-of-the-art tools for the precise control of material removal. These systems offer a variety of features built for precise patterning and control over the etching process. The systems come with an Atomic Layer Deposition (ALD) option for the deposition of thin films. These ALD films can be used to protect certain areas from the etching process, providing a high degree of control over the end result. Additionally, the systems offer a variety of post-processing options such as oven baking and thermal annealing. All of these features make HHV's RIE systems an incredibly versatile and powerful tool.


Reactive ion etching, or RIE, is an essential process in the fabrication of electronic devices. It is a dry etching technique that uses an electrical field to accelerate ions towards the surface of a material, thereby removing atoms from it. RIE systems are used in a variety of industries, including semiconductor manufacturing, medical device production, and aerospace engineering.


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For more information visit our website: https://hhv.in/

Site No. 17, Phase 1, Peenya Industrial Area, Bengaluru – 560058, India

Phone: +91-80-41931000

Fax: +91-80-28394874

Email: [email protected]


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