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Application of PFA products in semiconductor industry

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Nanjing Binglab
Application of PFA products in semiconductor industry

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Development of the semiconductor industry

Semiconductors are a key element in modern electronics and are an essential part of many commonly used electronic devices, including smartphones, tablets, and personal computers, which are basically modern devices that many of us rely on in our daily lives. It is precisely because of the core position of the semiconductor industry that it has extensive competitiveness.


The important role of PFA products in the semiconductor industry

Due to the extremely high specification requirements in the production process of electronic products, slight contamination or impurity will seriously affect the yield, electrical performance and reliability of delicate semiconductor materials.

Throughout the IC manufacturing process, whether wet etching or chemical mechanical polishing (CMP), even small amounts of impurities can have a huge impact on the final product. Therefore, electronic component manufacturers are responsible for raw materials, transportation pipelines and reactions. This means that during the entire manufacturing process, the requirements for containers etc. are high. It is difficult to find an extreme chemical environment that can withstand strong acid, strong alkali, high temperature and high pressure. At this time, the important role of PFA is highlighted.


Application of PFA products in semiconductor industry

Wet etching and cleaning: In the wet process, the wafer is first cleaned, then etched, and then the photoresist and residues from the etching process are cleaned. During this process, PFA is made into various tools, such as PFA cassettes, PFA soaking barrels, PFA beakers, etc., to ensure high purity of etching solutions and cleaning solutions; thereby ensuring high production efficiency.


Chemical Mechanical Polishing (CMP): The CMP process smoothes the wafer surface prior to vapor deposition. The liquid used is a slurry containing fine particles. If the particles in the slurry are too large, they will remain on the wafer surface. These traces can cause product defects. Containers made of PFA can somewhat prevent impurities in the slurry from coming into contact with the wafer.


Supports: The wafers are placed on specially shaped supports throughout the wet process. PFA can be made of various shapes into holders or cassettes, and used throughout the wafer processing process.

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